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Issues:
The input and output station on this Steag wafer cleaner needed to be FOUP compatible and the complex, unreliable custom automation needed to be replaced. Pumps, servo motors and temperature controllers that were proprietary to Steag (no longer in business) needed to be replaced with COTS components.
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 Key aspect of this success story was to retain the tool footprint and to maintain seamless integrated look while replacing and updating custom components with standard ones. |
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Solution:
CE-i designed I/O modules that use only 2 industry standard active components. FOUPs are handled with an Asyst ISOPort and wafers are moved with a Staubli TX60 robot. We defined higher performance components that are COTS, reducing lead times of up to 30 weeks to less than 2 weeks for all components. We were not privy to the proprietary component specifications but our extensive knowledge of tool components allows us to reverse engineer and specify the components needed to meet the requirements. |
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Results:
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▪ Improved Maintainability
▪ Reduced Cost ▪ Increased Reliability |
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