Cutting Edge-ineering : Success Story : Wafer ID Station

Cutting Edge-ineering will design and build custom EFEMs for your tool. We will take your requirements and provide an EFEM that matches your system.

The integrated tool will look like a single entity, NOT a back end with a front end grafted on!

OPTIONS:

▪ Any wafer size to 300 mm	▪ 300 mm FOUP Automatic Door Openers (ADO)
▪ 200 mm SMIF openers	▪ Class 1 Mini Environment
▪ Up to 4 load stations	▪ Wafer Aligner
▪ Stand alone control or integrated into your system	▪ 200 mm open cassette capability on 300 mm ADOs
▪ Up to 4 pick/place locations for your equipment	▪ Vertical wafer orientation at pick/place locations

If you want another option, ask... we can do it! Give us your requirements; we will do it faster, better and more cost effective!

SUCCESS STORY: Wafer ID Station

Automatically reads and records the etched identifying marks on the back of all the 300 mm wafers in a FOUP or FOSB
Unloads each wafer from the FOUP/FOSB; moves it to an aligner which positions the wafer so the optical system can view and capture the image of the ID mark; records the ID in an Access database and then returns the wafer to the FOUP/FOSB.
Reads all SEMI Standard scribes such as T7, M12, etc.
Custom HMI allows reading of multiple scribes at various locations based on a user defined recipe.
Innovative load station provides extremely user friendly “fool proof” placement of all types of 300 mm FOUPs or FOSBs from any manufacturer, including manual open FOSBs, 13 wafer open cassettes, and 26 wafer FOUPs.
Integrated bar code reader allows input of FOUP/FOSB IDs, Operator IDs, Traveler sheet IDs, etc.
Provides a minimum of 155 wafers per hour through put
Only requires a single 15A standard 110V AC connection and a 21 inHg vacuum source.
HMI is a touch screen for ease of use in a clean room by operators with gloves.

The WIDS can be customized to meet your specific requirements.